Combining lithography and Directed Self Assembly for the manufacturing of vias : connections to graph coloring problems, integer programming formulations, and numerical experiments
Dehia Ait-Ferhat, Vincent Juliard, Gautier Stauffer, Juan Andres Torres
| Year of publication: |
2020
|
|---|---|
| Authors: | Ait-Ferhat, Dehia ; Juliard, Vincent ; Stauffer, Gautier ; Torres, Juan Andres |
| Published in: |
European journal of operational research : EJOR. - Amsterdam : Elsevier, ISSN 0377-2217, ZDB-ID 243003-4. - Vol. 280.2020, 2 (16.1.), p. 453-468
|
| Subject: | DSA | Graph coloring | Integer programming | Integrated circuit manufacturing | Lithography | Ganzzahlige Optimierung | Graphentheorie | Graph theory | Industrie | Manufacturing industries |
| Type of publication: | Article |
|---|---|
| Type of publication (narrower categories): | Aufsatz in Zeitschrift ; Article in journal |
| Language: | English |
| Other identifiers: | 10.1016/j.ejor.2019.07.021 [DOI] |
| Source: | ECONIS - Online Catalogue of the ZBW |
Persistent link: https://www.econbiz.de/10012132419