PROPERTIES OF COPPER LAYER ON Si(100) FROM Cu(dmamb)2
Year of publication: |
2010
|
---|---|
Authors: | JIN, SEONG-EON ; LEE, DOHAN ; LEE, SEUNGMOO ; CHOI, JONG-MUN ; KIM, BUMJOON ; KIM, CHANG GYOUN ; CHUNG, TACK-MO ; BYUN, DONG-JIN |
Published in: |
Surface Review and Letters (SRL). - World Scientific Publishing Co. Pte. Ltd., ISSN 1793-6667. - Vol. 17.2010, 03, p. 307-310
|
Publisher: |
World Scientific Publishing Co. Pte. Ltd. |
Subject: | CVD | buffer layer | barrier layer | Cu(dmamb)2 | diffusion |
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