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type:"article"
~person:"Li, You"
~person:"Teece, David J."
~person:"Zhang, Jie"
~subject:"Fuzzy sets"
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Fuzzy neural network based yield prediction model for semiconductor manufacturing system
Wu, Lihui
;
Zhang, Jie
- In:
International journal of production research
48
(
2010
)
10/12
,
pp. 3225-3243
Persistent link: https://www.econbiz.de/10003975748
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