YANG, J. H.; CHENG, M. F.; LUO, X. D.; ZHANG, T. H. - In: Surface Review and Letters (SRL) 13 (2006) 04, pp. 519-524
The PVD-TiN film was implanted with titanium ions and the improvement in surface wear resistance was investigated. Ti ion implantation was done using a metal vapor vacuum arc (MEVVA) ion source with an implantation dose of 2 × 1016 ions/cm2 and at an extraction voltage of 48 kV. The wear...