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~isPartOf:"Computers & operations research : and their applications to problems of world concern ; an international journal"
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Multi-step virtual metrology for semiconductor manufacturing : a multilevel and regularization methods-based approach
Susto, Gian Antonio
;
Pampuri, Simone
;
Schirru, Andrea
; …
- In:
Computers & operations research : and their …
53
(
2015
),
pp. 328-337
Persistent link: https://www.econbiz.de/10010493468
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