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A run-to-run controller for product surface quality improvement
Bao, Lulu
;
Wang, Kaibo
;
Wu, Tianying
- In:
International journal of production research
52
(
2014
)
15
,
pp. 4469-4487
Persistent link: https://www.econbiz.de/10010401394
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2
A hierarchical model for characterising spatial wafer variations
Bao, Lulu
;
Wang, Kaibo
;
Jin, Ran
- In:
International journal of production research
52
(
2014
)
6
,
pp. 1827-1842
Persistent link: https://www.econbiz.de/10010257284
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