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International journal of production research : American Institute of Industrial Engineers ; Society of Manufacturing Engineers
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Performance assessment of run-to-run control in semiconductor manufacturing based on IMC framework
Chen, Liang
;
Ma, Mingda
;
Jang, Shi-shang
;
Wang, David …
- In:
International journal of production research
47
(
2009
)
15
,
pp. 4173-4199
Persistent link: https://www.econbiz.de/10003890720
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