ZHOU, YAN MING; MA, YANG ZHAO; XIE, ZHONG; HE, MING ZHI - In: Surface Review and Letters (SRL) 21 (2014) 02, pp. 1450028-1
Structure evolution and electric properties of tantalum nitride (TaN) films deposited on Al2O3-based ceramic and glass substrates by magnetron reactive sputtering were carried out as a function of the N2-to-Ar flow ratio. The TaN thin films on Al2O3-based ceramic substrates grow with...