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~person:"Bae, Suk Joo"
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Bae, Suk Joo
Hwang, Jung Yoon
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IIE transactions / Institute of Industrial Engineers, Norcross, Ga : industrial engineering and development
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Yield prediction via spatial modeling of clustered defect counts across a wafer map
Bae, Suk Joo
;
Hwang, Jung Yoon
;
Kuo, Way
- In:
IIE transactions / Institute of Industrial Engineers, …
39
(
2007
)
12
,
pp. 1073-1084
Persistent link: https://www.econbiz.de/10007873798
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