WANG, Q.; OZAKI, K.; ISHIKAWA, H.; NAKANO, S.; OGISO, H. - In: Surface Review and Letters (SRL) 13 (2006) 02, pp. 329-334
implantation were evaluated by the curvature technique. The effects of irradiation doses and ion species on the residual stress … all the ions, and Fe and Au ions, among these ions, produced a higher level of residual stress at the same implantation …