Kim, Dong-Gyu; Yoo, Kwang Su; Kim, Hye-mi; Park, Jin-Seong - 2022
We studied nitrogen (N) incorporation effects on the electrical characteristics of silicon dioxide (SiO2) fabricated by plasma-enhanced atomic layer deposition (PEALD). To determine whether N could be incorporated into the SiO2, the oxygen (O2) or nitrous oxide (N2O) plasma were used during the...