HE, LIJUN; LI, CHUAN; LIU, XINGZHAO - In: Surface Review and Letters (SRL) 21 (2014) 02, pp. 1450024-1
rate increasing, the residual stress value decreases at various inclined angles. With the increasing film thickness, the … residual stress value decreases at various inclined angles. With the increasing testing temperature, the residual stress value … increases at various inclined angles. While the alumina thin film residual stress value is small at high inclined angle. By …