Yu, W.; Zhang, J. Y.; Ding, W. G.; Fu, G. S. - In: The European Physical Journal B - Condensed Matter and … 57 (2007) 1, pp. 53-56
We have investigated the photoluminescence (PL) properties of amorphous silicon nanoparticles (a-Si NPs) embedded in silicon nitride film (Si-in-SiN<Subscript>x</Subscript>) grown by helicon wave plasma-enhanced chemical vapor deposition (HWP-CVD) technique. The PL spectrum of the film exhibits a broad band...</subscript>