RUSOP, M.; SOGA, T.; JIMBO, T. - In: Surface Review and Letters (SRL) 12 (2005) 03, pp. 333-342
Surface morphology, deposition rate, bonding composition, structural, optical and electrical properties of XeCl excimer pulsed laser deposited amorphous carbon nitride (a-CNx) films using camphoric carbon (C10H16O) target in 0.8 Torr nitrogen (N) gas ambient as a function of laser fluences (LF)...