RUSOP, M.; SOGA, T.; JIMBO, T. - In: Surface Review and Letters (SRL) 12 (2005) 02, pp. 185-195
Amorphous carbon nitride films (a-CNx) were deposited by pulsed laser deposition of camphoric carbon target with different substrate temperatures (ST). The influence of ST on the synthesis of a-CNx films was investigated. The nitrogen-to-carbon (N/C) and oxygen-to-carbon (O/C) atomic ratios,...