Kim, Daeil - In: Renewable Energy 36 (2011) 2, pp. 525-528
Sn-doped In2O3 (ITO) thin films were deposited on a glass substrate with reactive RF magnetron sputtering and then post-deposition electro-annealed. The electron accelerating voltage was varied from 300 to 900 V, and the substrate temperature was increased to 250 °C with an electron...