LI, HAI; ZHANG, XIAO-DONG; ZHANG, YI; OUYANG, ZHEN-QIAN; … - In: Surface Review and Letters (SRL) 14 (2007) 01, pp. 129-134
Fabrication of structures on the micro- and nanometer scales is of great importance for both fundamental research and potential applications. While microlithography methods are relatively established, the production of multi-component micro- and nanostructures with high density still presents...