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INFLUENCE OF SUBSTRATE TEMPERATURE ON STRUCTURAL, ELECTRICAL AND OPTICAL PROPERTIES OF ITO THIN FILMS PREPARED BY RF MAGNETRON SPUTTERING
HE, BO
;
ZHAO, LEI
;
XU, JING
;
XING, HUAIZHONG
;
XUE, SHAOLIN
- In:
Surface Review and Letters (SRL)
20
(
2013
)
05
,
pp. 1350045-1
In this paper, we investigated
indium-tin-oxide
(ITO) thin films on glass substrates deposited by RF magnetron …
Persistent link: https://www.econbiz.de/10011011155
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