Shen, Limeng; Zhang, Xi; Wang, Huanming; Li, Jiafei; … - 2022
Mn-doped polycrystalline SiGe thin films are fabricated by radio frequency magnetron sputtering and subsequent rapid thermal annealing. Structural characterizations show that the Mn atoms are distributed uniformly in the SiGe matrix and mainly occupy the substitutional sites with 2+ state. X-ray...