BERA, PARTHASARATHI; ANANDAN, CHINNASAMY - In: Surface Review and Letters (SRL) 21 (2014) 04, pp. 1450054-1
CeO2 thin films were deposited on Si, Al, Ti–6Al–4V alloy, Si3N4 and glass substrates by magnetron sputtering at room temperature. Growth of CeO2 films on Si and Si3N4 and effect of annealing were investigated by XRD, FESEM and AFM. Interaction between deposited CeO2 films and Si, Al,...