Choi, Sung Jin; Yu, Gwon Jong; Kang, Gi Hwan; Lee, … - In: Renewable Energy 54 (2013) C, pp. 96-100
The doping process in diffusion furnace consisting of pre-deposition and drive-in steps is essential to create p–n junction in crystalline silicon solar cell fabrication, and its optimization is necessary to obtain the high conversion efficiency. In this work, pre-deposition time was varied to...