This study deals with the scheduling problem to minimize makespan at a wet clean station in semiconductor fabrication. The wet clean station is comprised of sequential chemical and rinsing baths for cleaning wafer lots and multiple robot arms for lot handling. In the station, wafer lots are...

With power systems switching to smart grids, real-time and on-line monitoring technologies for underground distribution power cables have become a priority. Most distribution components have been developed with self-diagnostic sensors to realize self-healing, one of the smart grid functions in a...

This paper compares the differences in economic feasibility and dynamic characteristics between underground (U/G) cable and overhead (O/H) line for low-voltage direct current (LVDC) distribution. Numerous low loaded long-distance distribution networks served by medium-voltage alternative current...