Prabakar, K.; Takahashi, T.; Nezuka, T.; Takahashi, K.; … - In: Renewable Energy 33 (2008) 2, pp. 277-281
The visible light-active nitrogen-doped TiO2 has been prepared by dc-reactive magnetron sputtering using Ti target in an Ar+O2/N gas mixture. The preparation of highly crystallized anatase TiOxNy thin films with various nitrogen concentrations allowed us to identify the optimum nitrogen flow...