SONG, WOOJIN; JUNG, KYUBONG; CHUN, DOO-MAN; AHN, SUNG-HOON - In: Surface Review and Letters (SRL) 17 (2010) 02, pp. 189-193
In this paper, alumina film was deposited using supersonic micronozzle in nano-particle deposition System (NPDS). Powder deposition at room temperature is important in the field of film deposition since high processing temperature can be a serious limitation for the deposition on flexible...