El amrani, A.; Menous, I.; Mahiou, L.; Tadjine, R.; … - In: Renewable Energy 33 (2008) 10, pp. 2289-2293
In this work, our aim was to determine the deposition parameters leading to optimal optical properties of Silicon nitride (SiN) film for photovoltaic application. The deposition was performed in an industrial pulsed direct-PECVD using a gas mixture of NH3/SiH4.