HUANG, SHIYONG; XU, S.; LONG, JIDONG; SUN, Z.; WANG, X. Z. - In: Surface Review and Letters (SRL) 13 (2006) 01, pp. 123-126
Polycrystalline silicon carbide (P-SiC) films containing SiC nanoparticles and Er were prepared by r.f. reactive magnetron co-sputtering technique with SiC and Er targets on low-temperature silicon (111) and silicon dioxide substrates with the mixed gas of pure argon, methane, and hydrogen....