WANG, YAOHUI; ZHANG, XU; XU, YUANZHI; WU, XIANYING; … - In: Surface Review and Letters (SRL) 14 (2007) 05, pp. 891-897
Nanocomposite nc-TiC/a-C:H films have been deposited via filtered cathodic vacuum arc technique, employing Ti target and C2H2 gas as material precursors. The composition and nanostructure of film, correlated to mechanical and tribological properties of film, are varied by changing C2H2 flow rate...