WANG, XINCHANG; ZHANG, JIANGUO; ZHANG, TAO; SHEN, BIN; … - In: Surface Review and Letters (SRL) 20 (2013) 03, pp. 1350031-1
velocity distributions in hot filament chemical vapor deposition (HFCVD) diamond film growth inside holes, using a detailed 3D … substrate temperature data measured in the actual HFCVD reactor with three chosen groups of parameters are compared with those … corresponding deposition parameters are also determined. Furthermore, HFCVD diamond films are deposited on the inner surfaces of …