Guo, Chao-Qian; Li, Hai-Qing; Peng, Ya-Li; Dai, Ming-Jiang - 2022
Hydrogen-free Al-DLC films were prepared by HiPIMS technology under different bias voltages through an Al-C composite target. Surface and cross-sectional morphologies, chemical composition, microphase structure and bonding state, residual stress, hardness and elastic modulus, friction...