MESLI, M. N.; BENBAHI, B.; BOUAFIA, H.; BELMEKKI, M.; … - In: Surface Review and Letters (SRL) 20 (2013) 03, pp. 1350038-1
increase of sheet resistance consequently to the shallow junctions obtained at the surface of substrate and the contribution of … of sheet resistance compared with classical ion implantation and despite dopant dose loss phenomenon. …