Wang, Yu-Cheng; Chen, Toly; Hsu, Ting Chuan - In: Decision analytics journal 1 (2021)
The cycle time of a wafer lot refers to the time that the wafer lot has experienced from its input to output …. Predicting the cycle time of each wafer lot is a crucial task for a wafer fabrication factory (wafer fab), but existing … prediction methods cannot achieve 100% accuracy. Therefore, if the range of the cycle time can be estimated, it will be of great …