LIU, SHA; ZHANG, JING QIU - In: Surface Review and Letters (SRL) 12 (2005) 05, pp. 727-731
CVD (chemical vapor deposition) coatings such as TiC, TiN, Al2O3 and so on are widely used as tools' surface preserved materials with corrosion resistance and wear resistance. Standard Gibbs free energy changes for reactions are widely used to approximately analyze the trends of substance...