Pankratov, E. L. - In: The European Physical Journal B - Condensed Matter and … 57 (2007) 3, pp. 251-256
It has recently been shown that growth of a multilayer structure with one or more delta-layers at high temperature leads to spreading and asymmetrization of the dopant distribution [see, for example, E.F.J. Schubert, Vac. Sci. Technol. A. <Emphasis Type="Bold">8, 2980 (1990), A.M. Nazmul, S. Sugahara, M. Tanaka, J....</emphasis>