XU, YING; CAI, YANQING; HOU, LINYAN; MA, PENGHUA - In: Surface Review and Letters (SRL) 21 (2014) 03, pp. 1450040-1
Al doped ZnO (AZO) thin films were deposited on a glass substrate by atmospheric pressure chemical vapor deposition (APCVD) method. Effect of Al doping concentration on microstructure, photoelectric properties and doped mechanism of AZO thin films were investigated. The analysis results revealed...