Borgoni, Riccardo; Radaelli, Luigi; Tritto, Valeria; … - In: Computational Statistics & Data Analysis 58 (2013) C, pp. 407-419
Deposition of silicon dioxide (SiO2) is a critical step of integrated circuit manufacturing; hence it is monitored during the manufacturing process at a grid of points defined on the wafer area. Since collecting thickness measurements is expensive, it is a compelling issue to investigate how a...