Chien, Chen-Fu; Dauzere-Peres, Stephane; Ehm, Hans; … - In: European Journal of Industrial Engineering 5 (2011) 3, pp. 254-271
This paper presents a brief overview of semiconductor manufacturing followed by the results of a panel session held at the Fourth International Conference on Modeling and Analysis of Semiconductor Manufacturing (MASM) in Miami, December 10, 2008 on the role of modelling and analysis in...
