Joubair, Ahmed; Slamani, Mohamed; Bonev, Ilian A. - In: Industrial Robot: An International Journal 39 (2012) 4, pp. 392-400
Purpose – The purpose of this paper is to describe a calibration method developed to improve the absolute accuracy of a … wafers and, even though its complete workspace is slightly larger, the accuracy improvements are performed within a target … that the absolute accuracy inside the target workspace was improved by reducing the maximum position and orientation errors …