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~isPartOf:"International journal of manufacturing technology and management"
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A comprehensive mathematical model to calculate polish time for oxide chemical mechanical process (CMP)
Kumar, Sushil
;
Garg, T. K.
;
Wani, V. P.
- In:
International journal of manufacturing technology and …
22
(
2011
)
2
,
pp. 145-159
Persistent link: https://www.econbiz.de/10008938032
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