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~isPartOf:"International journal of production research"
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International journal of production research
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A general tool-based multi-product model for high-mixed production in semiconductor manufacturing
Chen, Liang
;
Chu, Liuxing
;
Ge, Cuicui
;
Zhang, Yueyuan
- In:
International journal of production research
61
(
2023
)
23
,
pp. 8062-8079
Persistent link: https://www.econbiz.de/10014452595
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Performance assessment of run-to-run control in semiconductor manufacturing based on IMC framework
Chen, Liang
;
Ma, Mingda
;
Jang, Shi-shang
;
Wang, David …
- In:
International journal of production research
47
(
2009
)
15
,
pp. 4173-4199
Persistent link: https://www.econbiz.de/10003890720
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