Lee, Sang-Hoon; Chung, Yung-Bin; Lee, Sung-Soo; Jung, … - In: Renewable Energy 54 (2013) C, pp. 85-90
The effect of HCl addition on the structural, electrical, and optical properties of p-type silicon films, prepared by hot-wire chemical vapor deposition (HWCVD), was investigated. As the ratio of HCl to SiH4 increased, the amount of amorphous silicon decreased and the crystalline volume fraction...