Interval robotic cells with several processing stages (chambers) have been increasingly used for diverse wafer fabrication processes in semi-conductor manufacturing. Processes such as low-pressure chemical vapor deposition, etching, cleaning and chemical-mechanical planarization, require strict...

This article considers the problems of scheduling operations in single-gripper and dual-gripper bufferless robotic cells in which the arrangement of machines is circular. The cells are designed to produce identical parts under the free-pickup criterion with additive intermachine travel time. The...