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A miniature plate-type hydrogen production reactor using methanol as fuel was designed and tested. This reactor is composed of a catalytic combustor, vaporizer, reformer, and methanator. All components were fabricated on one piece of rectangular quartz glass plate 50mm×44mm×7mm in size. The...
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In recent years, the exponential-weighted-moving-average (EWMA) statistic based controllers are popular in semiconductor manufacturing. However, the single EWMA controller is not sufficient for compensating for the wear-out process. Thus, a double EWMA controller was proposed to enhance the...
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