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A wedge-shaped iron (Fe) film system, quenched by silicone oil during deposition, has been prepared on glass substrates by direct current magnetron sputtering, and the influence of external disturbance on buckling patterns is investigated. The experiment shows that the wedge-shaped Fe film...
Persistent link: https://www.econbiz.de/10010883191
Tantalum (Ta) films deposited on glass substrates have been prepared by a direct current magnetron sputtering method, and buckling patterns induced by residual compressive stress are investigated in detail. When the film thickness increases, the buckling morphologies evolve from straight-sided...
Persistent link: https://www.econbiz.de/10010660976