Titanium films of 120 nm thickness were magnetron sputtered on glass substrates at room temperature, and subsequently they were annealed under flowing oxygen atmosphere at different temperatures and time. Atomic force microscopy (AFM) was used to study topographic characteristics of the films,...

To investigate the initial morphological evolution of 321 stainless steel (SS) films, we examined the effect of sputtering time on the morphology of 321 SS film. In this study, a group of samples were prepared at nine different sputtering times within 20 s using radio-frequency (r.f.) magnetron...