Pankratov, E. L.; Spagnolo, B. - In: The European Physical Journal B - Condensed Matter and … 46 (2005) 1, pp. 15-19
We analyze the dopant diffusion in p-n-junction in heterostructure, by solving the diffusion equation with space-varying diffusion coefficient. For a step-wise spatial distribution we find the optimum annealing time to decrease the p-n-junction thickness and to increase the homogeneity of...