Showing 1 - 5 of 5
In the present work, we report on the evidence for a high negative charge density in aluminum oxinitride (AlON) coating on silicon. A comparative study was carried out on the composition and electrical properties of AlON and aluminum nitride (AlN). AlON films were deposited on p-type Si (100)...
Persistent link: https://www.econbiz.de/10011044896
Persistent link: https://www.econbiz.de/10009280062
Persistent link: https://www.econbiz.de/10009689282
Persistent link: https://www.econbiz.de/10010054340
Persistent link: https://www.econbiz.de/10006663937