Flexible robotic cells combine the capabilities of robotic flow shops with those of flexible manufacturing systems. In an m-machine flexible cell, each part visits each machine in the same order. However, the m operations can be performed in any order, and each machine can be configured to...

Interval robotic cells with several processing stages (chambers) have been increasingly used for diverse wafer fabrication processes in semi-conductor manufacturing. Processes such as low-pressure chemical vapor deposition, etching, cleaning and chemical-mechanical planarization, require strict...