The cycle time of a wafer lot refers to the time that the wafer lot has experienced from its input to output. Predicting the cycle time of each wafer lot is a crucial task for a wafer fabrication factory (wafer fab), but existing prediction methods cannot achieve 100% accuracy. Therefore, if the...

Deep neural networks (DNNs) have been applied to predict the cycle times of jobs in manufacturing accurately. However, the prediction mechanism of a DNN is complex and difficult to communicate. This limits its acceptability (or practicability) in real-world applications. An explainable...