This paper proposes to use Muther’s systematic layout planning procedure as the infrastructure to solve a fab layout design problem. A multiple objective decision making tool, analytic hierarchy process, is then proposed to evaluate the design alternatives. The proposed procedure is...

A bay configuration arranged along a central spine and served by an automated monorail material‐handling system are common designs for the layout and material‐handling system in new semiconductor wafer fabrication facilities. Investigates the facility design problem in semiconductor...