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Manufacturing system
450mm wafer manufacturing system
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job shop
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International journal of production research
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A real-time scheduling method for the cluster tool with wafer transfer delay
Lim, Si-yeong
;
Park, You-jin
;
Lee, Hyun
;
Hur, Sun
- In:
International journal of production research
52
(
2014
)
4
,
pp. 934-946
Persistent link: https://www.econbiz.de/10010256323
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